On creating EUV:

"In our laser-produced plasma (LPP) source, molten tin droplets of around 25 microns in diameter are ejected from a generator at 70 meters per second. As they fall, the droplets are hit first by a low-intensity laser pulse that flattens them into a pancake shape. Then a more powerful laser pulse vaporizes the flattened droplet to create a plasma that emits EUV light. To produce enough light to manufacture microchips, this process is repeated 50,000 times every second."

Recently, I bought number of shares of AMSL, they are very expensive per share (about $750), but I hope company will do very well in the future.