Isn’t this only possible because ASML has licensed EUV technology from DARPA, a US research program? Plus ASML has a lot of US based engineering employees.
There is no relation to DARPA at all.
ASML licensed from the DOE, and this license is from 1997, almost 30 years ago. Then, in 2001, ASML bought a US silicon company that had the EUV patents. That was 25 years ago. Those patents expired already.
In the case of ASML the US still has leverage over the Dutch government to apply to ASML, but ASML also have a lot of leverage because it's not like the the US can go to alternative vendors. "We're going to sell to China and if you don't play nice we won't sell to you any more" is, well, pretty unlikely but certainly feasible.