Considering one of ASML's machines supposedly costs half a billion dollars to produce, yeah, $20k is piss to ASML. They could literally sell shares at some fraction of a fraction of ownership, effectively printing money for no voting rights, and pay people six-figure bonuses for staying. Depending on role, maybe 7-figure.
Too bad there isn’t competition on the lithography side… they know for now ASML can treat them as serfs. Chinese EUV startups are coming just not fast enough, even then there is still a stranglehold on ingot manufacturing. This industry is run like a cartel.